JPS6268229U - - Google Patents

Info

Publication number
JPS6268229U
JPS6268229U JP16011885U JP16011885U JPS6268229U JP S6268229 U JPS6268229 U JP S6268229U JP 16011885 U JP16011885 U JP 16011885U JP 16011885 U JP16011885 U JP 16011885U JP S6268229 U JPS6268229 U JP S6268229U
Authority
JP
Japan
Prior art keywords
melt
holder
spacer
substrate holder
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16011885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16011885U priority Critical patent/JPS6268229U/ja
Publication of JPS6268229U publication Critical patent/JPS6268229U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP16011885U 1985-10-18 1985-10-18 Pending JPS6268229U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16011885U JPS6268229U (en]) 1985-10-18 1985-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16011885U JPS6268229U (en]) 1985-10-18 1985-10-18

Publications (1)

Publication Number Publication Date
JPS6268229U true JPS6268229U (en]) 1987-04-28

Family

ID=31085197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16011885U Pending JPS6268229U (en]) 1985-10-18 1985-10-18

Country Status (1)

Country Link
JP (1) JPS6268229U (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52111375A (en) * 1976-03-16 1977-09-19 Mitsubishi Electric Corp Production of semi-conductor crystal
JPS54152862A (en) * 1978-05-23 1979-12-01 Sharp Corp Semiconductor producing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52111375A (en) * 1976-03-16 1977-09-19 Mitsubishi Electric Corp Production of semi-conductor crystal
JPS54152862A (en) * 1978-05-23 1979-12-01 Sharp Corp Semiconductor producing device

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